[14p-A305-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

△ [14p-A305-7] Elucidation of carrier mobility improvement mechanism in solid-phase-crystallized Ge thin films with controlling heat-treatment process

〇Toshifumi Imajo^1,2, Takashi Suemasu¹, Kaoru Toko¹ (1.Univ. of Tsukuba, 2.JSPS Research Fellow)

Keywords:Ge, Solid-phase crystallization, Thin film