Lab-scale EUV Microscope for Stain-Free Visualization of Higher-Order Structures on Polymer Materials

Presentation information

Symposium (Oral)

Symposium » Progresses and future on EUV and soft x-ray imaging techniques

Sat. Mar 14, 2020 1:30 PM - 5:20 PM D305 (11-305)

Tetsuo Harada(Univ. of Hyogo)

5:05 PM - 5:20 PM

〇Mitsunori Toyoda^1,2, Yukifumi Momono², Toshiyuki Kakudate², Jun Chen¹ (1.Tokyo Polytechnic Univ., 2.IMRAM, Tohoku Univ.)

Keywords:multilayer mirror