〇Nobukazu Teranishi^1,2, Tetsuo Harada¹, Takeo Watanabe¹, Quan Zhou³, Masatoshi Kimura³, Jan Bogaerts³, Xinyang Wang³ (1.LASTi, U. of Hyogo, 2.RIE, Shizuoka Univ., 3.Gpixel Inc.)

5:05 PM - 5:20 PM

[14p-D305-8] Lab-scale EUV Microscope for Stain-Free Visualization of Higher-Order Structures on Polymer Materials

〇Mitsunori Toyoda^1,2, Yukifumi Momono², Toshiyuki Kakudate², Jun Chen¹ (1.Tokyo Polytechnic Univ., 2.IMRAM, Tohoku Univ.)

Sessions

Symposium » Progresses and future on EUV and soft x-ray imaging techniques

[14p-D305-1~8] Progresses and future on EUV and soft x-ray imaging techniques

[14p-D305-1] Restoration of the Martian water environment from Martian meteorites using synchrotron-based X-ray microscopy

[14p-D305-2] High-order harmonic light source for ultrafast soft x-ray imaging

[14p-D305-3] Microspectroscopy and operando measurement using synchrotron radiation soft X-ray for active materials of Li ion batteries

[14p-D305-4] Spatial Structures of Undulator Radiation and their Possible Applications

[14p-D305-5] 1200X review function of EUV mask blank inspection systems

[14p-D305-6] Imaging of nano-scale magnetic texture by coherent soft x-ray diffraction

[14p-D305-7] CMOS Image Sensor Development for Soft X-ray and EUV Application

[14p-D305-8] Lab-scale EUV Microscope for Stain-Free Visualization of Higher-Order Structures on Polymer Materials

Authentication