[14p-PB10-1~5] 15.7 Crystal characterization, impurities and crystal defects

△ [14p-PB10-3] Effect of nitrogen doping on intrinsic point defect behavior in growing CZ-Si crystal

〇(M1)Motoharu Taniguchi¹, Koji Sueoka², Masataka Hourai³ (1.Master of Okyayama Pref. Univ., 2.Okayama Pref. Univ., 3.SUMCO CORPORATION)

Keywords:intrinsic point defect, nitrogen, first principles analysis