[15a-A404-1~11] 17.3 Layered materials

[15a-A404-2] Growth of two-dimensional superlattices with Cold-walled Metal-Organic CVD

〇Satoshi Iida¹, Takato Hotta¹, Nanami Ichinose¹, Kenji Watanabe², Takashi Taniguchi², Zheng Liu³, Ryo Kitaura¹ (1.Nagoya Univ, 2.NIMS, 3.AIST)

Keywords:MOCVD, TMD, superlattice

In this study, we focused on crystal growth using Metal-Organic Chemical Vapor Deposition (MOCVD) for developing a basic technology: growth of junction and stacking-type 2D-heterostructures on sub-nanometer scale. In this presentation, we report the crystal growth of two-dimensional junction-type superlattices consisting of WS₂ and MoS₂.