[15a-D215-1~12] 7.2 Applications and technologies of electron beams

[15a-D215-2] Stop-motion SEM Imaging of Vibration Phenomenon by Electron Beam Biprism

〇Yuuga Emoto¹, Yu Kikuchi¹, Samuel Jeong¹, Hideki Masuda¹, Yoshikazu Ito¹, Jun-ichi Fujita¹ (1.Tsukuba Univ.)

Keywords:electronmicroscopy, electron biprism

In electron microscopes, there is a method of stroboscopic imaging by pulsing the primary electron beam. We used periodic deflection by a metal wire used for electron biprism as a technique to pulse the primary electron beam in SEM. In this talk, we report the method and the acquisition of a static phase image of cantilever resonance.