Post-Annealing Effects on the Properties of Nitrogen-Doped DLC Films

Hiroya Osanai; Kazuki Nakamura; Haruto Koriyama; Yasuyuki Kobayashi; Yoshiharu Enta; Yushi Suzuki; Maki Suemitsu; Hideki Nakazawa

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15a-D221-1~6] 6.2 Carbon-based thin films

Sun. Mar 15, 2020 10:30 AM - 12:00 PM D221 (11-221)

Kazuhiro Kanda(Univ. of Hyogo)

11:30 AM - 11:45 AM

[15a-D221-5] Post-Annealing Effects on the Properties of Nitrogen-Doped DLC Films

〇Hiroya Osanai¹, Kazuki Nakamura¹, Haruto Koriyama¹, Yasuyuki Kobayashi¹, Yoshiharu Enta¹, Yushi Suzuki¹, Maki Suemitsu², Hideki Nakazawa¹ (1.Hirosaki Univ, 2.Tohoku Univ)

Keywords:diamond-like carbon

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