[15a-D419-1~12] 6.1 Ferroelectric thin films

△ [15a-D419-11] Evaluation of tetragonal (1-x)(Bi,Na)TiO₃-xBaTiO₃ films prepared by PLD method.

〇(M1)Keisuke Ishihama¹, Akinori Tateyama¹, Takao Shimizu¹, Yusuke Sato², Wakiko Yamaoka², Mirai Ishida², Hiroshi Funakubo¹ (1.Tokyo Tech, 2.TDK corp.)

Keywords:Lead-free piezoelectric material, Ferroelectric, Thin film

The lead-free piezoelectric material (1-x)(Bi,Na)TiO₃-xBaTiO₃ has been well studied near the MPB composition, but there are few reports on other compositions.
This time, we succeeded in making (1-x)(Bi,Na)TiO₃-xBaTiO₃ film over a wide composition range, and confirmed its ferroelectric and piezoelectric properties.