Improvement of shear-mode electromechanical coupling of c-axis-parallel-oriented ZnO film by annealing treatment

Presentation information

Poster presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.6 Ultrasonics

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PA1 (PA)

9:30 AM - 11:30 AM

〇(M2)Kanae Kimoto¹, Shinji Takayanagi¹, Takahiko Yanagitani² (1.Doshisha Univ., 2.Waseda Univ.)

Keywords:Shear wave resonator, Piezoelectric thin film, Zinc oxide