[15a-PB1-1~20] 6.4 Thin films and New materials

[15a-PB1-2] Optimization of preparation process of Bi-substituted Magnetic Garnet Films
by means of an Excimer-Laser assisted Metal Organic Deposition Process

〇Haruka Aiba¹, Kazuto Sodeyama¹, Takumi Fujita¹, Masami Nishikawa¹, Hirofumi Nonaka¹, Masami Kawahara², Tomohiko Nakajima³, Tetsuo Tsuchiya³, Takayuki Ishibashi¹ (1.Nagaoka Univ. of Tech., 2.Kojundo Chem. Lab., 3.AIST)

Keywords:Laser assisted MOD method, Excimer Laser, Bi-substituted Magnetic Garnet Films