[15a-PB3-1~12] 13.4 Si系プロセス・Si系薄膜・MEMS・装置技術

▲ [15a-PB3-11] Fabrication of crystalline silicon solar cells by rapid heating with carbon heating tube

〇Ryota Seki¹、Takuma Uehara¹、Tomoyoshi Miyazaki^1,2、Go Kobayashi³、Izumi Serizawa³、Masahiko Hasumi¹、Takuji Arima¹、Toshiyuki Sameshima¹ (1.TUAT、2.TRL、3.ORC)

キーワード：activation