Thin film formation by vacuum evaporation of SrSi<sub>2</sub>

Presentation information

Poster presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PB3 (PB)

9:30 AM - 11:30 AM

〇(M2)Shuuhei Takizawa¹, Kosuke Hara¹, Junnji Yamanaka¹, Keisuke Arimoto¹ (1.Univ. of Yamanashi)

Keywords:SrSi2, Vacuum evaporation method, Thin-film formation