[15a-PB4-1~13] 16.3 Bulk, thin-film and other silicon-based solar cells

[15a-PB4-7] Performance of Silicon Heterojunction Solar Cells with Counter-doped n-a-Si

〇Tu ThiCam Huynh¹, Noboru Yamaguchi², Keisuke Ohdaira¹ (1.JAIST, 2.ULVAC)

Keywords:counter-doping, plasma ion implantation, Cat-CVD p-a-Si