The 67th JSAP Spring Meeting 2020

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13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-A305-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sun. Mar 15, 2020 1:45 PM - 4:30 PM A305 (6-305)

Akito Hara(Tohoku Gakuin Univ.), Tatsuya Okada(Univ. of the Ryukyus)

1:45 PM - 2:00 PM

[15p-A305-1] Issues for the Crystallization of a-Si Films and TFTs on Panel(2)

〇Takashi Noguchi1, Tatsuya Okada1 (1.University of the Ryukyus)

Keywords:Si thin film, Laser Anneal, TFT