[15p-A305-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-A305-6] [INVITED] History and Trends of System-on-Glass Technology with Low Temperature Poly-Si TFT

〇Yoshiharu Nakajima¹ (1.Japan Display Inc.)

Keywords:display, low temperature poly-Si TFT, system on glass

Low Temperature Poly-Si (LTPS) Thin Film Transistor (TFT) technology has been widely used in small-medium sized liquid crystal displays (LCDs) and organic-light-emitted-diode (OLED) displays having high resolution pixels. This technology is recently applied to sensor devices such as touch sensor and fingerprint sensor. In this address, the history of System-on-Glass technology of LTPS TFT is explained and the next trend is introduced.