[15p-D215-1~11] 7.3 Micro/Nano patterning and fabrication

[15p-D215-5] Fabrication of multi-layer fine structures by transfer process using double layer PMMA film

〇Hiroaki Kawata¹, Takenori Yamamoto¹, Shunsuke Yagi¹, Masaaki Yasuda¹, Yoshihiko Hirai¹ (1.Osaka Pref. Univ.)

Keywords:three-dimensional, thermal bonding, thermal imprint

To fabricate a multi-layer three-dimensional fine structure with air gap patterns, a patterned PMMA film fabricated on a PVA / PET bilayer film, which was used as a sacrificial film, was transferred to a Si substrate with fine PMMA patterns by thermal bonding. The patterned PMMA film consist of a two-layer PMMA layers, which were a strong high molecular weight PMMA layer with fine patterns and a soft low molecular weight PMMA layer as an adhesive layer. A two-layer structure was successfully fabricated, but air gaps was disappeared. In the future, we will optimize the transfer conditions.