Hiroaki Kawata

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 1:45 PM - 4:45 PM D215 (11-215)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[15p-D215-1~11] 7.3 Micro/Nano patterning and fabrication

2:45 PM - 3:00 PM

[15p-D215-5] Fabrication of multi-layer fine structures by transfer process using double layer PMMA film

〇Hiroaki Kawata¹, Takenori Yamamoto¹, Shunsuke Yagi¹, Masaaki Yasuda¹, Yoshihiko Hirai¹ (1.Osaka Pref. Univ.)