The 67th JSAP Spring Meeting 2020

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1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.6 Ultrasonics

[15p-D305-1~13] 1.6 Ultrasonics

Sun. Mar 15, 2020 1:15 PM - 4:45 PM D305 (11-305)

Yuji Ohashi(Tohoku Univ.), Jun Kondoh(Shizuoka Univ.)

2:15 PM - 2:30 PM

△ [15p-D305-5] Deterioration in the piezoelectric property of ScAlN thin film by negative ion bombardment increased in low-pressure sputtering deposition

〇Takumi Tominaga1, Shinji Takayanagi1, Takahiko Yanagitani2 (1.Doshsha Univ., 2.Waseda Univ.)

Keywords:ScAlN, sputtering deposition, piezoelectric thin film