[15p-D311-1~8] 6.3 Oxide electronics

[15p-D311-4] Characterization of vanadium oxide thin film deposited by chemical bath deposition

〇Joonam Kim^1,2, Yuri Nakada¹, Mutsumi Sugiyama^1,2 (1.Tokyo Univ. of Sci., 2.RIST TUS)

Keywords:VO2, CBD, thermochromic

VO₂ has been focused on by researchers as a self-temperature control element for a smart window because its electrical conductance varies by several orders of magnitude at 68 °C from semiconductor which has a large IR transmittance to metallic-like conductivity which has a high IR reflectance. To achieve the smart window, fabricating a large area of VO₂ thin film on a glass substrate using a cheap and simple method is necessary for cost-effective optical applications. Although there are various techniques such as pulsed laser deposition and radio frequency sputtering, these methods require expensive equipment because they use a vacuum, and this is a limitation for deposition on a large glass. In this study, we present the synthesis and characterization of thermochromic VO₂ using chemical bath deposition (CBD), which is the simplest method for applying a glass substrate for a smart window. Notably, we discuss the process in which a metal dopant such as Sn is used to control the phase transition temperature of VO₂ during CBD.