Tomohiro Kuyama

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:00 AM - 11:30 AM N102 (Oral)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12a-N102-1~9] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:15 AM - 10:30 AM

[12a-N102-5] [Young Scientist Presentation Award Speech] Admittance Analysis of Defect Creation near Dielectric/Si Interface by Plasma Exposure

〇Tomohiro Kuyama^1,2, Keiichiro Urabe¹, Koji Eriguchi¹ (1.Kyoto Univ., 2.JSPS Research Fellow)