The 82nd JSAP Autumn Meeting 2021

Session information

Oral presentation

8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12a-N102-1~9] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Sun. Sep 12, 2021 9:00 AM - 11:30 AM N102 (Oral)

Mitsuhiro Omura(Kioxia corporation), Kazuo Takahashi(Kyoto Inst. of Tech.)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

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