Rikyu Minami

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:00 AM - 11:30 AM N102 (Oral)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12a-N102-1~9] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:15 AM - 9:30 AM

△ [12a-N102-2] Spectroscopic ellipsometry of gallium nitride surface during plasma etching process

〇Rikyu Minami¹, Kenji Ishikawa¹, Takayoshi Tsutsumi¹, Hiroki Kondo¹, Makoto Sekine¹, Osamu Oda¹, Masaru Hori¹ (1.Nagoya Univ.)