Shota Nunomura

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:00 AM - 11:30 AM N102 (Oral)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12a-N102-1~9] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

11:00 AM - 11:15 AM

[12a-N102-8] Generation and annihilation of plasma-induced defects ~ roles of mobile H ~

〇Shota Nunomura¹, Isao Sakata¹, Takayoshi Tsutsumi², Masaru Hori² (1.AIST, 2.Nagoya Univ.)

11:15 AM - 11:30 AM

[12a-N102-9] Passivating antireflection properties of i/n a-Si:H/SiN trilayer over c-Si wafer, prepared by PECVD

〇Shota Nunomura¹, Isao Sakata¹, Aiko Sato¹, Michael Lozac'h¹, Tatsuya Misawa², Naho Itagaki³, Masaharu Shiratani³ (1.AIST, 2.Saga Univ., 3.Kyushu Univ.)

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