Akiko Hirata

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:00 AM - 11:30 AM N102 (Oral)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12a-N102-1~9] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:45 AM - 11:00 AM

△ [12a-N102-7] Effect of Atomic Layer Etching Adsorption Layer on Substrate Damage Generation

〇Akiko Hirata^1,2, Masanaga Fukasawa¹, J. U. Tercero², Tomoko Ito², Michiro Isobe², Kazuhiro Karahashi², Satoshi Hamaguchi², Katsuhisa Kugimiya¹, Yoshiya Hagimoto¹, Hayato Iwamoto¹ (1.Sony Semiconductor Solutions Corp., 2.Osaka Univ.)

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