Mitsuhiro Omura

→ Search for Mitsuhiro Omura in Google Scholar

Chairperson, etc.

Sun. Sep 12, 2021 9:00 AM - 11:30 AM N102 (Oral)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12a-N102-1~9] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Mitsuhiro Omura(Kioxia corporation), Kazuo Takahashi(Kyoto Inst. of Tech.)