Ken Goto

Speaker, Author, Co-Author

Mon. Sep 13, 2021 1:00 PM - 4:45 PM S201 (Oral)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[13p-S201-1~14] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

3:00 PM - 3:15 PM

[13p-S201-8] Thermodynamic analysis of β-Ga₂O₃ growth by MOVPE and its experimental verification

〇Ken Goto¹, Nami Tanaka¹, Taro Nishimura¹, Kazutada Ikenaga^1,2, Masato Ishikawa³, Hideaki Machida³, Yoshinao Kumagai¹ (1.Tokyo Univ. of A & T, 2.TAIYO NIPPON SANSO, 3.Gas-Phase Growth)