Mengnan Ke

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:00 PM - 4:15 PM N323 (Oral)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[10p-N323-1~12] 13.3 Insulator technology

2:15 PM - 2:30 PM

▲ [10p-N323-6] Evaluation of electron and hole slow trap density in Al₂O₃/GeO_x/p-Ge gate stacks by C-V measurements

〇Mengnan Ke¹, Takenaka Mitsuru², Shinichi Takagi² (1.Tokyo Univ. of Sci., 2.Univ. of Tokyo)