Yusuke Hayashi

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 9:30 AM - 11:30 AM N101 (Oral)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[10a-N101-1~7] 15.4 III-V-group nitride crystals

10:45 AM - 11:00 AM

[10a-N101-5] Crack Formation Criteria for High-Temperature-Annealed Sputtered AlN

〇Yusuke Hayashi¹, Kenjiro Uesugi^2,3, Kanako Shojiki⁴, Hideto Miyake^3,4, Tetsuya Tohei¹, Akira Sakai¹ (1.Grad. Sch. Eng. Sci., Osaka Univ., 2.SPORR, Mie Univ., 3.Grad. Sch. RIS, Mie Univ., 4.Grad. Sch. Eng., Mie Univ.)

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