Ryo Morisaki

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 9:00 AM - 12:15 PM N204 (Oral)

Oral presentation
| CS Code-sharing session
| 【CS.10】 Code-sharing Session of 6.5 & 7.6

[10a-N204-1~12] CS.10 Code-sharing Session of 6.5 & 7.6

10:45 AM - 11:00 AM

△ [10a-N204-7] Plasma Analysis in a New Fast Atom Beam Source for Surface Activated Bonding

〇Ryo Morisaki¹, Junpei Sakurai¹, Chiemi Oka¹, Takahiro Yamazaki¹, Takayoshi Akao², Tomonori Takahashi², Hiroyuki Tsuji², Noriyasu Ohno¹, Seiichi Hata¹ (1.Nagoya Univ., 2.NGK INSULATORS, LTD.)

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