Akira Onishi

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 10:30 AM - 12:00 PM N302 (Oral)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-N302-1~6] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:15 AM - 11:30 AM

△ [10a-N302-4] A Single Au Proof Mass 3-Axis MEMS Accelerometer with 3D Capacitive Detection Electrode

〇Akira Onishi¹, Akihiro Uchiyama¹, Kohei Shibata¹, Takashi Ichikawa¹, Sangyeop Lee¹, Shin-ichi Iida², Noboru Ishihara¹, Katsuyuki Machida¹, Kazuya Masu¹, Hiroyuki Ito¹ (1.Tokyo Tech., 2.NTT-AT)

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