POWEI CHENG

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 10:30 AM - 12:00 PM N302 (Oral)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-N302-1~6] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:30 AM - 11:45 AM

▼ [10a-N302-5] Metallization of Three-Dimensional Complex Structure as Functional Components in Electronic Devices

〇(M2)POWEI CHENG¹, Yi Chun Chen¹, Taku Ichibayashi^1,2, Tso-Fu Mark Chang¹, Masato Sone¹, Suzushi Nishimura¹ (1.Tokyo Tech, 2.ENEOS Corp.)