Masaya Morita

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 4:30 PM N102 (Oral)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[10p-N102-1~11] 15.4 III-V-group nitride crystals

2:15 PM - 2:30 PM

△ [10p-N102-4] Effects of high N₂ sputtering gas ratio on the growth of non-polar AlN on Si

〇Masaya Morita^1,2, Keiji Ishibashi³, Kenichiro Takahashi³, Shigenori Ueda², Toyohiro chikyow², Atsushi Ogura^1,4, Takahiro Nagata² (1.Meiji Univ., 2.NIMS, 3.COMET Inc., 4.MREL)