Yuya Suemoto

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 4:30 PM N102 (Oral)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[10p-N102-1~11] 15.4 III-V-group nitride crystals

3:30 PM - 3:45 PM

[10p-N102-8] Stress control of GaN layer by sputtering with low oxygen GaN target

〇Yuya Suemoto¹, Yoshihiro Ueoka¹, Masami Mesuda¹ (1.Tosoh Corporation)