4:15 PM - 4:30 PM [10p-N104-12] Surface passivation on crystalline silicon surfaces by SiNx/SiOx stacks formed by catalytic chemical vapor deposition and nitric acid oxidation 〇(D)Hiroki Nakajima1, Huynh Thi Cam Tu1, Keisuke Ohdaira1 (1.JAIST)