Haruki Kojima

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:00 PM - 6:15 PM N104 (Oral)

Oral presentation
| 16 Amorphous and Microcrystalline Materials
| 16.3 Bulk, thin-film and other silicon-based solar cells

[10p-N104-1~18] 16.3 Bulk, thin-film and other silicon-based solar cells

3:00 PM - 3:15 PM

△ [10p-N104-8] Evaluation of damage to c-Si substrate induced by plasma enhanced chemical vapor deposition of a-Si:H films

〇Haruki Kojima¹, Tappei Nishihara¹, Kazuhiro Gotoh², Noritaka Usami², Tomohiko Hara³, Yoshio Ohshita³, Atsushi Ogura^1,4 (1.Meiji Univ., 2.Nagoya Univ., 3.Toyota Tech. Inst., 4.Meiji Renewable Energy Laboratory)

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