Kota Kato

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 6:30 PM N202 (Oral)

Oral presentation
| 15 Crystal Engineering
| 15.5 Group IV crystals and alloys

[10p-N202-1~19] 15.5 Group IV crystals and alloys

1:30 PM - 1:45 PM

[10p-N202-1] Rapid trench-filling growth of Ge epitaxial layer on Si

Kazuki Motomura¹, 〇Kota Kato¹, Piedra-Lorenzana Jose A.¹, Bin Amin Mohd Faiz¹, Takeshi Hizawa¹, Tetsuya Nakai², Yasuhiko Ishikawa¹ (1.Toyohashi Univ., 2.SUMCO Corporation)

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