Yuhei Nemoto

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 4:15 PM N304 (Oral)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[10p-N304-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

1:45 PM - 2:00 PM

[10p-N304-2] Etching behavior of zirconium oxide in acid solutions

〇Yuhei Nemoto¹, Masaaki Hirakawa², Yukako Ikegami² (1.Shibaura Mechatronics Corp., 2.Corporate Manufacturing Engineering Center, Toshiba Corporation)