Masashi Ogata

→ Search for Masashi Ogata in Google Scholar

Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:00 PM - 4:15 PM N323 (Oral)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[10p-N323-1~12] 13.3 Insulator technology

3:45 PM - 4:00 PM

[10p-N323-11] Evaluation of Charge Distribution in SiO₂ Film by Substrate Charge Measurement During Etching in HF solution

〇Masashi Ogata¹, Takashi Shishikura¹, Ryu Hasunuma¹ (1.Univ. of Tsukuba)