Tomohiro Kuyama

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:00 PM - 4:15 PM N323 (Oral)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[10p-N323-1~12] 13.3 Insulator technology

4:00 PM - 4:15 PM

[10p-N323-12] Evaluation of Dielectric Degradation in MOS Structures Under Reverse-Bias Stress Using Time-Dependent Impedance Spectroscopy (TDIS)

〇Tomohiro Kuyama^1,2, Keiichiro Urabe¹, Koji Eriguchi¹ (1.Kyoto Univ., 2.JSPS Research Fellow)