HISATSUGU KURITA

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:00 PM - 4:15 PM N323 (Oral)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[10p-N323-1~12] 13.3 Insulator technology

3:00 PM - 3:15 PM

[10p-N323-8] LPCVD SiN Film Breakdown and N₂-anneal Temperature(Ⅰ)TDDB and ESR Evaluations

〇HISATSUGU KURITA¹, MASATAKA NAKAMURA¹, HAYATO MIYAGAWA², YOSHIAKI KAMIGAKI³ (1.ROHM Hamamatsu., 2.Kagawa Univ., 3.E&B Research Lab.)