Hayato Miyagawa

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:00 PM - 4:15 PM N323 (Oral)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[10p-N323-1~12] 13.3 Insulator technology

3:15 PM - 3:30 PM

[10p-N323-9] LPCVD SiN Film Breakdown and N₂-anneal Temperature (Ⅱ): ESR and FTIR Evaluations

〇Hayato Miyagawa¹, Hisatsugu Kurita², Masataka Nakamura², Yoshiaki Kamigaki³ (1.Kagawa Univ., 2.ROHM Hamamatsu., 3.E&B Research Lab.)