Hidetaka Shimawaki

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:00 PM - 3:45 PM N401 (Oral)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[10p-N401-1~10] 7.2 Applications and technologies of electron beams

3:15 PM - 3:30 PM

[10p-N401-9] Electron Emission from Planar-type Electron Source based on Nanocrystalline Silicon (II)

〇Hidetaka Shimawaki¹, Katsuhisa Murakami², Masayoshi Nagao², Hidenori Mimura³ (1.Hachinohe Inst., 2.AIST, 3.Shizuoka Univ.)