Yoshiki Inoue

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:00 PM - 5:00 PM S202 (Oral)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[10p-S202-1~14] 15.6 Group IV Compound Semiconductors (SiC)

1:00 PM - 1:15 PM

[10p-S202-1] Optimization of furnace temperature distribution in SiC sublimation process using machine learning

〇(M2)Yoshiki Inoue¹, Tomoaki Furusho², Kentaro Kutsukake^2,3, Shunta Harada^1,2, Miho Tagawa^1,2, Toru Ujihara^1,2,4 (1.Nagoya Univ., 2.IMaSS Nagoya Univ., 3.AIP RIKEN, 4.GAN-OIL AIST)

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