Yohsuke Matsushita

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:00 PM - 5:00 PM S202 (Oral)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[10p-S202-1~14] 15.6 Group IV Compound Semiconductors (SiC)

4:00 PM - 4:15 PM

[10p-S202-11] Expansion start points of Shockley Stacking Faults from BPD in 4H-SiC Epitaxial Layer by Ultraviolet Irradiation

〇Yohsuke Matsushita¹, Kazumi Takano¹, Yasuyuki Igarashi¹, Muneo Sasaki², Yuya Yamada² (1.ITES Co. Ltd., 2.Industrial Research Center of Shiga Prefecture)

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