Masaya Hayashi

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:00 PM - 5:00 PM S202 (Oral)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[10p-S202-1~14] 15.6 Group IV Compound Semiconductors (SiC)

4:30 PM - 4:45 PM

[10p-S202-13] Design and verification of gas distributor for 4H-SiC wafer etching

〇Masaya Hayashi¹, Hitoshi Habuka¹, Yoshinao Takahashi², Tomohisa Kato³ (1.Yokohama National Univ., 2.KANTO DENKA KOGYO, 3.AIST)