Takuto Maeda

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:00 PM - 6:30 PM S203 (Oral)

Oral presentation
| 6 Thin Films and Surfaces
| 6.3 Oxide electronics

[10p-S203-1~21] 6.3 Oxide electronics

5:15 PM - 5:30 PM

[10p-S203-17] Controlling the reactive sputtering depositioncondition of SnO2thin filmsfor improvement the sensitivityof visible-light-transparent CO2sensors

〇Takuto Maeda¹, Yuta Arai¹, Mutumi Sugiyama^1,2 (1.Tokyo Univ. Sci., 2.RIST)