Hirokazu Fujiwara

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 9:00 AM - 12:00 PM N205 (Oral)

Oral presentation
| CS Code-sharing session
| 【CS.9】 Code-sharing Session of 6.1 & 13.3 & 13.5

[11a-N205-1~11] CS.9 Code-sharing Session of 6.1 & 13.3 & 13.5

9:00 AM - 9:15 AM

[11a-N205-1] [Highlight]Nondestructive analysis of ferroelectric Hf_0.5Zr_0.5O₂ capacitors by laser-based photoelectron emission microscopy

〇Hirokazu Fujiwara¹, Toshiyuki Taniuchi², Cedric Bareille², Masaharu Kobayashi³, Shik Shin^2,4 (1.ISSP, 2.MIRC, 3.d.lab, 4.The Univ. of Tokyo)