Kento Izumi

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 9:00 AM - 12:00 PM N205 (Oral)

Oral presentation
| CS Code-sharing session
| 【CS.9】 Code-sharing Session of 6.1 & 13.3 & 13.5

[11a-N205-1~11] CS.9 Code-sharing Session of 6.1 & 13.3 & 13.5

10:00 AM - 10:15 AM

[11a-N205-5] Endurance Characteristics of Ferroelectric Hf_xZr_1-xO₂ Thin Film Treated by FLA

〇Kento Izumi¹, Yuto Ota¹, Hikaru Kawarazaki², Hideaki Tanimura², Shinichi Kato², Yasuo Nara¹ (1.Univ. of hyogo, 2.SCREEN semicon.)