Toshiyuki Horiuchi

→ Search for Toshiyuki Horiuchi in Google Scholar

Speaker, Author, Co-Author

Sat. Sep 11, 2021 9:00 AM - 10:15 AM N401 (Oral)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[11a-N401-1~5] 7.3 Micro/Nano patterning and fabrication

9:00 AM - 9:15 AM

[11a-N401-1] Verification of Resist Patterning Using a Prototype Projection Exposure System Equipped with a Pair of Parabolic Mirrors

〇Toshiyuki Horiuchi¹, Hiroshi Kobayashi¹ (1.Tokyo Denki Univ.)