Chen Tang

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 9:00 AM - 10:15 AM N401 (Oral)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[11a-N401-1~5] 7.3 Micro/Nano patterning and fabrication

9:15 AM - 9:30 AM

[11a-N401-2] Surface Property Control for 193nm Immersion Resist by the Si material addition

〇Chen Tang¹, Atsushi Sekiguchi^2,3, Masaaki Yasuda³, Yoshihiko Hirai³ (1.Shanghai Sinyang Semi. Mater. Co., Ltd, 2.LTJ Co., Ltd, 3.Osaka Pref. Univ.)